Polymer Piezoresistive MEMS accelerometer with Integrated ITO

被引：0
|
作者：
Saranya, B. T. [1 ]
Anjana, C. [1 ]
Tina, B. S. [1 ]
Seena, V. [1 ]
机构：
[1] Indian Inst Space Sci & Technol, Dept Avion, Dept Space, Thiruvananthapuram, Kerala, India
来源：
2017 IEEE 12TH NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC) | 2017年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：127 / 128
页数：2
相关论文
共 50 条
  • [11] Design and Simulation of Piezoresistive MEMS Accelerometer for the Detection of pathological Tremor
    Biswas, Sonali
    Gogoi, Anup Kr
    IEEE SOUTHEASTCON 2014, 2014,
  • [12] Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology
    Du Chunhui
    He Changde
    Yu Jiaqi
    Ge Xiaoyang
    Zhang Yongping
    Zhang Wendong
    JOURNAL OF SEMICONDUCTORS, 2012, 33 (10)
  • [13] Squeeze Film Air Damping Analysis of MEMS Piezoresistive Accelerometer
    Mukhiya, R.
    Bhattacharyya, T. K.
    ICSE: 2008 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2008, : 198 - 202
  • [14] Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology
    杜春晖
    何常德
    于佳琪
    葛晓洋
    张永平
    张文栋
    半导体学报, 2012, 33 (10) : 48 - 52
  • [15] High G MEMS integrated accelerometer
    Davies, BR
    Barron, CC
    Montague, S
    Smith, JH
    Murray, JR
    Christenson, TR
    Bateman, VI
    SMART ELECTRONICS AND MEMS - SMART STRUCTURES AND MATERIALS 1997, 1997, 3046 : 52 - 62
  • [16] Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure
    Jian Dong
    Zhi-jian Long
    Heng Jiang
    Li Sun
    Microsystem Technologies, 2017, 23 : 1563 - 1574
  • [17] Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure
    Dong, Jian
    Long, Zhi-jian
    Jiang, Heng
    Sun, Li
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (05): : 1563 - 1574
  • [18] A High Performance MEMS Piezoresistive Accelerometer for Pathological Tremor Diagnostic System
    Chitra, N.
    Gnanammal, J. Grace Jency
    PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON DEVICES, CIRCUITS AND SYSTEMS (ICDCS) 2016, 2016, : 157 - 160
  • [19] Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer
    Zhao, Yulong
    Li, Xiaobo
    Liang, Jing
    Jiang, Zhuangde
    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2013, 27 (03) : 831 - 836
  • [20] Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer
    Yulong Zhao
    Xiaobo Li
    Jing Liang
    Zhuangde Jiang
    Journal of Mechanical Science and Technology, 2013, 27 : 831 - 836
12345