Integration of zinc oxide thin films with polyimide-based structures

被引：0

作者：

Matsumura, M ^{[1
]}

Bandic, Z ^{[1
]}

Camata, RP ^{[1
]}

机构：

[1] Univ Alabama, Dept Phys, Birmingham, AL 35294 USA

来源：

Materials, Integration and Technology for Monolithic Instruments | 2005年 / 869卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Zinc oxide (ZnO) films were deposited on polyimide-based substrates by pulsed laser deposition. The ZnO films and the underlying polymer layers were studied using Fourier Transform Infrared (FTIR) and Photoluminescence (PL) spectroscopies. FTIR measurements in structurally well-characterized samples exhibiting all X-ray reflections of crystalline hexagonal ZnO show absorbance bands around 405 cm(-1) (Zn-O stretching vibration) and I 110 cm-1 (in-plane C-H vibrations on aromatic rings of polyimide). Observed shifts in both absorption features as a function of deposition temperatures can probably be attributed to thermal stress in the layers. PL measurements showed broad spectra centered around 3.35 eV from ZnO excitonic emission and a broader PL band from 2.7 to 3.1 eV defect complex emissions. The appearance of these peaks was consistent for depositions of ZnO on non-organic substrates, which indicates that the integration of ZnO thin films on polymer based substrate preserved the characteristic optical properties of ZnO.

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页码：127 / 132

页数：6

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