Impact of incomplete ionization of dopants on the electrical properties of compensated p-type silicon

被引:23
|
作者
Forster, M. [1 ,2 ,3 ]
Cuevas, A. [2 ]
Fourmond, E. [3 ]
Rougieux, F. E. [2 ]
Lemiti, M. [3 ]
机构
[1] APOLLON SOLAR, F-69002 Lyon, France
[2] Australian Natl Univ, Coll Engn & Comp Sci, Sch Engn, Canberra, ACT 0200, Australia
[3] INSA LYON, INL, F-69621 Villeurbanne, France
关键词
UNIFIED MOBILITY MODEL; DEVICE SIMULATION; HOLE; TEMPERATURE; PHOSPHORUS; BORON;
D O I
10.1063/1.3686151
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper investigates the importance of incomplete ionization of dopants in compensated p-type Si and its impact on the majority-carrier density and mobility and thus on the resistivity. Both theoretical calculations and temperature-dependent Hall-effect measurements demonstrate that the carrier density is more strongly affected by incomplete ionization in compensated Si than in uncompensated Si with the same net doping. The previously suggested existence of a compensation-specific scattering mechanism to explain the reduction of mobility in compensated Si is shown not to be consistent with the T-dependence of the measured carrier mobility. The experiment also shows that, in the vicinity of 300 K, the resistivity of compensated Si has a much weaker dependence on temperature than that of uncompensated silicon. (C) 2012 American Institute of Physics. [doi:10.1063/1.3686151]
引用
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页数:7
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