[1] Ecole Natl Super Chim Paris, Chim ParisTech, Lab Genie Proc Plasmas & Traitements Surfaces, F-75005 Paris, France
[2] Ecole Super Phys & Chim Ind Ville Paris, Lab Microfluid MEMS & Nanostruct, F-75005 Paris, France
[3] Univ Laval, Fac Sci & Genie, Dept Genie Min Met & Mat, Lab Biomat & Bioingn, Quebec City, PQ G1V 0A6, Canada
[4] Univ Laval, Fac Sci & Genie, Dept Genie Min Met & Mat, Ctr Quebecois Mat Fonct, Quebec City, PQ G1V 0A6, Canada