Low-invasive estimation of physical properties in numerically ill-conditioned mems

A prototype system for comprehensive evaluation of micro and nano-electromechanical systems is presented. It features constitutive-empirical modeling methodology closely linked with symbolic, arbitrary precision computations. It is capable of resolving ambiguities created by numerical ill-conditioning in micro and nano scale systems. For precision low-invasive laboratory investigations or production (wafer level) metrology it employs laser interferometry and white light profilometry supported by extensive signal and system analysis software. Experimental results obtained with microfabricated beams and resonators illustrate the current performance of the system and hint its potential applications.