Comparison of CO-gas sensing characteristics between mono- and multi-layer Pt/SnO2 thin films

被引：21
作者：
Kim, DH [1 ]
Lee, SH [1 ]
Kim, KH [1 ]
机构：
[1] Pusan Natl Univ, Dept Inorgan Mat Engn, Pusan 609735, South Korea
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 77卷 / 1-2期
基金：
英国工程与自然科学研究理事会;
关键词：
Pt catalyst; SnO2; film; multi-layer; gas-sensor; CO gas;
D O I：
10.1016/S0925-4005(01)00749-3
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Sensing characteristics of Pt/SnO2 thin composite films to CO gas were investigated. The composite films were fabricated by rf magnetron sputtering technique. Surface morphology of Pt/SnO2 film was modified to improve its sensitivity to CO gas. The SnO2 films on which Pt was deposited for 12 s showed the maximum sensitivity (R-air/R-CO = 1.23 to CO gas of 200 ppm) at the sensor operation temperature of 175 degreesC. To increase the sensitivity higher, multi-layer Pt/SnO2 films was suggested in this work. The multi-layer Pt/SnO2 film was prepared by depositing SnO2 and Pt cluster layers again on the mono-layer Pt (12 s)/SnO2 film. Compared with SnO2 films on which only one Pt layer deposited, multi-layer films exhibited remarkable improvement of sensitivity to CO gas (R-air/R-CO = 1.72 to CO gas of 200 ppm). The increase of the interface area between Pt and SnO2 was reasoned for the superior GO-sensitivity of the multi-layer film. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：427 / 431
页数：5
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