Layered Semiconducting 2D Materials for Future Transistor Applications

被引:114
|
作者
Su, Sheng-Kai [1 ]
Chuu, Chih-Piao [1 ]
Li, Ming-Yang [1 ]
Cheng, Chao-Ching [1 ]
Wong, H-S Philip [1 ]
Li, Lain-Jong [1 ]
机构
[1] Taiwan Semicond Mfg Co TSMC, Corp Res, 168 Pk Ave 2,Hsinchu Sci Pk, Hsinchu 30075, Taiwan
来源
SMALL STRUCTURES | 2021年 / 2卷 / 05期
关键词
2D materials; complementary metal-oxide-semiconductors; InSe; PtSe2; SnSe; transistor scaling; WS2; HIGH-ELECTRON-MOBILITY; MONOLAYER; CAPACITANCE; TRANSPORT; CONTACTS; MOSFETS; ENHANCEMENT; DISULFIDE; INSE; SNS;
D O I
10.1002/sstr.202000103
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Down-scaling of transistor size in the lateral dimensions must be accompanied by a corresponding reduction in the channel thickness to ensure sufficient gate control to turn off the transistor. However, the carrier mobility of 3D bulk semiconductors degrades rapidly as the body thickness thins down due to more pronounced surface scattering. Two-dimensional-layered materials with perfect surface structures present a unique opportunity as they naturally have atomically thin and smooth layers while maintaining high carrier mobility. To benefit from continuous scaling, the performance of the scaled 2D transistors needs to outperform Si technology nowadays. There are already quite a few reviews discussing on the material property of potential 2D materials. It is believed that rigorous analysis based on industrial perspectives is needed. Herein, an analysis on channel material selection is presented and arguments on the four selected 2D semiconductors are provided, which can possibly meet the needs of future transistors, including WS2, SnSe, PtSe2, and InSe. The challenges and recent related research progresses for each material are also discussed.
引用
收藏
页数:11
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