Processing and microstructure of Ba0.4Sr0.6TiO3 thin-film prepared by RF magnetron sputtering

被引：2

作者：

Shen, Zongyang ^{[1
]}

Wu, Zhaohui ^{[1
]}

Yao, Zhonghua ^{[1
]}

Luo, Dabing ^{[1
]}

Cao, Minghe ^{[1
]}

Chen, Wen ^{[1
]}

Xu, Qing ^{[1
]}

Zhou, Ran ^{[1
]}

Liu, Hanxing ^{[1
]}

机构：

[1] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China

来源：

FERROELECTRICS | 2007年 / 357卷

关键词：

film; RF magnetron sputtering; perovskite;

D O I：

10.1080/00150190701527902

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ba0.4Sr0.6TiO3 (BST)films were deposited on quartz substrates by radio frequency (RF) magnetron sputtering in O-2/Ar atmosphere. The structural property of the film was studied by XRD, the morphology by AFM and the cross-section by SEM. As-grown films were amorphous and presented compacted grain morphology, its surface fluctuation was about 3 nm. When sputtering time was higher than or equal to 3 h, the annealing temperature above 550 degrees C, the crystalline film has been identified as a cubic perovskite structure. When sputtering time was 5 h, the thickness of film was about 1 mu m. Different thickness films could be obtained by controlling the sputtering time.

引用

页码：58 / 64

页数：7

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