Ferroelectric BaTiO3 Thin Films on Ti Substrate Fabricated Using Pulsed-Laser Deposition

被引：6

作者：

He, J. ^{[1
]}

Jiang, J. C. ^{[1
]}

Liu, J. ^{[2
]}

Collins, G. ^{[2
]}

Chen, C. L. ^{[2
]}

Lin, B. ^{[3
]}

Giurgiutiu, V. ^{[3
]}

Guo, R. Y. ^{[4
]}

Bhalla, A. ^{[4
]}

Meletis, E. I. ^{[1
]}

机构：

[1] Univ Texas Arlington, Dept Mat Sci & Engn, Arlington, TX 76019 USA

[2] Univ Texas San Antonio, Dept Phys & Astron, San Antonio, TX 78249 USA

[3] Univ S Carolina, Dept Mech Engn, Columbia, SC 29208 USA

[4] Univ Texas San Antonio, Dept Elect & Comp Engn, San Antonio, TX 78249 USA

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2010年 / 10卷 / 09期

基金：

美国国家科学基金会;

关键词：

Ferroelectric Films; Titanium Substrate; Microstructure; Interface; SEM; TIEM; ACTUATORS; SENSORS; GROWTH;

D O I：

10.1166/jnn.2010.2567

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report on the fabrication of ferroelectric BaTiO3 thin films on titanium substrates using pulsed laser deposition and their microstructures and properties. Electron microscopy studies reveal that BaTiO3 films are composed of crystalline assemblage of nanopillars with average cross sections from 100 nm to 200 nm. The BaTiO3 films have good interface structures and strong adhesion with respect to Ti substrates by forming a rutile TiO2 intermediate layer with a gradient microstructure. The room temperature ferroelectric polarization measurements show that the as-deposited BTO films possess nearly the same spontaneous polarization as the bulk BTO ceramics indicating formation of ferroelectric domains in the films. Successful fabrication of such ferroelectric films on Ti has significant importance for the development of new applications such as structural health monitoring spanning from aerospace to civil infrastructure. The work can be extended to integrate other ferroelectric oxide films with various promising properties to monitor the structural health of materials.

引用

页码：6245 / 6250

页数：6

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