The description of charge transfer in fast negative ions scattering on water covered Si(100) surfaces

被引:12
作者
Chen, Lin [1 ,2 ]
Qiu, Shunli [1 ,2 ]
Liu, Pinyang [1 ,2 ]
Xiong, Feifei [1 ,2 ]
Lu, Jianjie [1 ,2 ]
Liu, Yuefeng [1 ,2 ]
Li, Guopeng [1 ,2 ]
Liu, Yiran [1 ,2 ]
Ren, Fei [1 ,2 ]
Xiao, Yunqing [1 ,2 ]
Gao, Lei [1 ,2 ]
Zhao, Qiushuang [1 ,2 ]
Ding, Bin [1 ,2 ]
Li, Yuan [1 ,2 ]
Guo, Yanling [1 ,2 ]
Chen, Ximeng [1 ,2 ]
机构
[1] Lanzhou Univ, Sch Nucl Sci & Technol, Lanzhou 730000, Peoples R China
[2] Lanzhou Univ, Minist Educ, Key Lab Special Funct Mat & Struct Design, Lanzhou 730000, Peoples R China
基金
中国国家自然科学基金;
关键词
Charge transfer; Semiconductor surface; Doping; Ion scattering; Negative ion; Positive ion; IN-SITU OBSERVATION; PROJECTED BAND-GAP; AUGER NEUTRALIZATION; OPTICAL-PROPERTIES; SILICON; EXCHANGE; HYDROGEN; ADSORPTION; COLLISIONS; ABSOLUTE;
D O I
10.1016/j.apsusc.2016.06.132
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Doping has significantly affected the characteristics and performance of semiconductor electronic devices. In this work, we study the charge transfer processes for 8.5-22.5 keV C- and F- ions scattering on H2O-terminated p-type Si(100) surfaces with two different doping concentrations. We find that doping has no influence on negative-ion formation for fast collisions in this relatively high energy range. Moreover, we build a model to calculate negative ion fractions including the contribution from positive ions. The calculations support the nonadiabatic feature of charge transfer. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:1174 / 1182
页数:9
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