Excimer laser technology development

被引：41

作者：

Ewing, JJ ^{[1
]}

机构：

[1] Ewing Technol Associates Inc, Bellevue, WA 98006 USA

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2000年 / 6卷 / 06期

关键词：

lasers; pulsed lasers; UV lasers;

D O I：

10.1109/2944.902155

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reviews the underlying physics and key technology developments of excimer lasers, The paper traces both e-beam pumped lasers, which were the initial vehicle for demonstrating the majority of these systems, and the more practical fast-pulse avalanche-discharge lasers, By solving the key technology issues derived from certain applications of interest to funding agencies, this past work has provided the laser of choice for any UV application requiring more than a few watts of output power. The technology developed enables UV output powers in excess of 1 kW and lifetimes of well over 109 shots.

引用

页码：1061 / 1071

页数：11

共 88 条

[1] INVERTED POPULATION IN DISSOCIATION OF CSBR MOLECULES [J].