Experimental Studies of Hysteresis in MEMS Accelerometers: A Commentary

被引：15

作者：

Luczak, Sergiusz ^{[1
]}

机构：

[1] Warsaw Univ Technol, Fac Mechatron, Inst Micromech & Photon, Div Design Precis Devices, PL-00661 Warsaw, Poland

来源：

IEEE SENSORS JOURNAL | 2015年 / 15卷 / 06期

关键词：

Accelerometer; experimental studies; hysteresis; MEMS; test rig; CALIBRATION METHOD; TILT SENSORS; SYSTEM; MODEL;

D O I：

10.1109/JSEN.2015.2390778

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper is a commentary on determining hysteresis of MEMS accelerometers, with references to publication Nonlinear Regression Model of a Low-g MEMS Accelerometer by Ang et al. It proves that the originally reported values of the errors due to hysteresis of MEMS accelerometers were over evaluated, and the observed phenomenon resulted from inadequate method of testing and application of unfit instrumentation. Appropriate precise test rig with manual drive is proposed and results of measurements realized by means of it are presented, proving insignificant influence of the hysteresis. Range of application of the used equipment is discussed, paying a careful attention to properties of the mechanical instrumentation employed. Few other related issues of lesser importance are also addressed.

引用

页码：3492 / 3499

页数：8

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