Size determination of nanoparticles in low-pressure plasma with laser-induced incandescence technique

被引:28
作者
Eom, GS
Park, CW
Shin, YH
Chung, KH
Park, S
Choe, W
Hahn, JW
机构
[1] Yonsei Univ, Sch Mech Engn, Seoul 120749, South Korea
[2] Korea Res Inst Stand & Sci, Laser Metrol Grp, Taejon 305600, South Korea
[3] Korea Res Inst Stand & Sci, Ctr Vacuum Technol, Taejon 305600, South Korea
[4] Korea Adv Inst Sci & Technol, Dept Phys, Discharge Phys & Applicat Lab, Taejon 305701, South Korea
关键词
D O I
10.1063/1.1599965
中图分类号
O59 [应用物理学];
学科分类号
摘要
We derive analytic formulas describing the temporal behavior of the laser-induced incandescence (LII) signal in both case of the heat transfer governed by radiation and collision. Using these formulas, we can describe the temporal behavior of the LII signal and determine the dimension of nanosize particles in low-pressure plasma. Simple calibration procedure is introduced for quantitative measurement of the particle size with the LII technique. (C) 2003 American Institute of Physics.
引用
收藏
页码:1261 / 1263
页数:3
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