High-Q Applicators for Microwave Processes in Material Science

For years the positive effect of employing microwave energy in material processing has been observed in multiple reactions, where it leads to shorter processing time in comparison to the conventional methods. However, in a large part of the reported experiments over-size, low-Q cavities and low spectrum purity magnetrons were employed as microwave power applicators and power sources respectively. This raises some doubts regarding the accuracy of described results as the equipment makes it particularly difficult to precisely control crucial parameters of such processes. The authors of this paper suggest a more systematic approach based on high-Q, single-mode microwave power applicators aimed at formulating a one-to-one relationship between the individual microwave-assisted process characteristics and the properties of the final product. An example TM010 cavity for sintering of silicon-based composites (e. g. Si-diamond) is designed and initially verified by means of coupled multiphysics thermodynamic-electromagnetic modeling.