High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr Kα

被引：1

作者：

Hoflijk, I. ^{[1
]}

Vanleenhove, A. ^{[1
]}

Vaesen, I. ^{[1
]}

Zborowski, C. ^{[1
]}

Artyushkova, K. ^{[2
]}

Conard, T. ^{[1
]}

机构：

[1] IMEC, MCACSA, Kapeldreef 75, B-3001 Leuven, Belgium

[2] Phys Elect, 18725 Lake Dr East, Chanhassen, MN 55317 USA

来源：

SURFACE SCIENCE SPECTRA | 2022年 / 29卷 / 01期

关键词：

SiO2; HAXPES; Cr K alpha;

D O I：

10.1116/6.0001524

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Silicon nitride (Si3N4) grown by metalorganic chemical vapor deposition on Si was analyzed using high-resolution high-energy x-ray photoelectron spectroscopy (HAXPES). The HAXPES spectra of Si3N4 obtained using monochromatic Cr K alpha radiation at 5414.8 eV include two survey scans (Al K alpha and Cr K alpha) and high-resolution spectra of Si 2p, Si 2s, Si 1s, and N 1s.

引用

页数：8

共 38 条

[1] High-energy x-ray photoelectron spectroscopy on Si3N4 with Ga Kα photons
Mascarenhas, Fiona Crystal
Hoflijk, Ilse
Vanleenhove, Anja
Vaesen, Inge
Zborowski, Charlotte
Conard, Thierry
SURFACE SCIENCE SPECTRA, 2022, 29 (01):
[2] High-energy x-ray photoelectron spectroscopy spectra of SiO2 measured by Cr Kα
Vanleenhove, Anja
Hoflijk, Ilse
Vaesen, Inge
Zborowski, Charlotte
Artyushkova, Kateryna
Conard, Thierry
SURFACE SCIENCE SPECTRA, 2022, 29 (01):
[3] High-energy x-ray photoelectron spectroscopy spectra of TiO2 measured by Cr Kα
Vanleenhove, A.
Hoflijk, I
Zborowski, C.
Vaesen, I
Artyushkova, K.
Conard, T.
SURFACE SCIENCE SPECTRA, 2022, 29 (01):
[4] High-energy x-ray photoelectron spectroscopy spectra of Al2O3 measured by Cr Kα
Hoflijk, I.
Zborowski, C.
Vaesen, I.
Vanleenhove, A.
Artyushkova, K.
Conard, T.
SURFACE SCIENCE SPECTRA, 2022, 29 (01):
[5] High-energy photoelectron spectroscopy of Si3N4 thin film on Si with Cr Ka excitation
Deleuze, Pierre-Marie
Artyushkova, Kateryna
Martinez, Eugenie
Renault, Olivier
SURFACE SCIENCE SPECTRA, 2022, 29 (01):
[6] High energy x-ray photoelectron spectroscopy Cr Kα measurement of bulk gadolinium
Zborowski, C.
Vanleenhove, A.
Hoflijk, I.
Vaesen, I.
Artyushkova, K.
Conard, T.
SURFACE SCIENCE SPECTRA, 2023, 30 (02):
[7] Hard x-ray photoelectron spectroscopy reference spectra of Bi with Cr Kα excitation
Zheng, Dong
Young, Christopher N.
Stickle, William F.
SURFACE SCIENCE SPECTRA, 2023, 30 (02):
[8] High energy x-ray photoelectron spectroscopy (HAXPES) Cr Kα measurement of bulk chromium
Zborowski, C.
Vanleenhove, A.
Hoflijk, I.
Vaesen, I.
Artyushkova, K.
Conard, T.
SURFACE SCIENCE SPECTRA, 2023, 30 (02):
[9] High energy x-ray photoelectron spectroscopy (HAXPES) Cr Kα measurement of bulk gold
Zborowski, C.
Vanleenhove, A.
Hoflijk, I.
Vaesen, I.
Artyushkova, K.
Conard, T.
SURFACE SCIENCE SPECTRA, 2023, 30 (02):
[10] High energy x-ray photoelectron spectroscopy (HAXPES) Cr Kα measurement of bulk copper
Zborowski, C.
Vanleenhove, A.
Hoflijk, I.
Vaesen, I.
Artyushkova, K.
Conard, T.
SURFACE SCIENCE SPECTRA, 2023, 30 (02):

← 1 2 3 4 →