Out-plane Dynamics Analysis for the Electromechanical Integrated Electrostatic Harmonic Motor

In this paper, a novel electrostatic harmonic micromotor excited by the electrostatic force is proposed, whose basic operating principle is also described. With the theory of the elasticity and electrostatics, the deformation energy, kinetic energy and the electric field energy are analyzed. Due to the Hamilton principle, the differential equation for the flexible ring out-plane vibration is established. The equation of the frequency is obtained and solved. The result is illustrated by a specific example. The change of frequency along with the main system parameters is discussed. This paper is significant to analyze further dynamic characteristic of this micromortor and choose the reasonable system parameters.