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- [1] Impact of dielectric film thickness on field emission in MEMS capacitive switchesMICROELECTRONICS RELIABILITY, 2022, 138Theocharis, J.Gardelis, S.Papaioannou, G.
Effect of Ambient on the Field Emission Induced-Damage in Dielectric-Less MEMS Capacitive Structures
被引：2
|作者：
Theocharis, John
[1
]
Gardelis, Spiros
[1
]
Papaioannou, George
[1
]
机构：
[1] Natl & Kapodistrian Univ Athens, Phys Dept, Athens 15784, Greece
关键词：
Electric breakdown;
Discharges (electric);
Micromechanical devices;
Cathodes;
Electric fields;
Surface morphology;
Plasmas;
Ambient gasses;
capacitors;
controlled environment;
corrosion;
electric discharge;
field emission;
MEMS;
townsend discharge;
subnormal glow discharge;
vacuum;
ELECTRICAL BREAKDOWN;
ATTACHMENT COEFFICIENTS;
DRY AIR;
SWITCHES;
IONIZATION;
WATER;
D O I：
10.1109/TDMR.2022.3159991
中图分类号：
TM [电工技术];
TN [电子技术、通信技术];
学科分类号：
0808 ;
0809 ;
摘要：
The impact of ambient on the field emission and the resulting breakdown induced damage of rigid MEMS capacitive structure are investigated. The effect of asperities burning due to Joule heating and the resulting explosive breakdown are presented. The breakdown gives rise to almost mirror craters formation on the cathode and anode electrodes. A linear relation between crater diameter and the breakdown current is found when breakdown occurs in vacuum. In ambient atmosphere the breakdown leads to large amplitude current oscillations and the formation of extended damage on both electrodes.
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页码：205 / 216
页数：12
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