Thickness determination of thin films using BSE spectra

被引：0
|
作者：
Schlichting, F [1 ]
Berger, D [1 ]
Niedrig, H [1 ]
机构：
[1] Tech Univ Berlin, Inst Opt, D-10623 Berlin, Germany
来源：
ELECTRON MICROSCOPY 1998, VOL 2: MATERIALS SCIENCE 1 | 1998年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：349 / 350
页数：2
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