Dynamic spectroscopic imaging ellipsometry

被引：6

作者：

Kim, Daesuk ^{[1
]}

Dembele, Vamara ^{[1
]}

Choi, Sukhyun ^{[1
]}

Hwang, Gukhyeon ^{[1
]}

Kheiryzadehkhanghah, Saeid ^{[1
]}

Joo, Chulmin ^{[2
]}

Magnusson, Robert ^{[3
]}

机构：

[1] Jeonbuk Natl Univ, Dept Mech Syst Engn, Jeonju 54896, South Korea

[2] Yonsei Univ, Dept Mech Engn, Seoul 03722, South Korea

[3] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA

来源：

OPTICS LETTERS | 2022年 / 47卷 / 05期

基金：

新加坡国家研究基金会;

关键词：

D O I：

10.1364/OL.451064

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Delta(lambda, x) dynamically at a speed of 30Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 x 50 mu m(2) in an hour. (C) 2022 Optica Publishing Group

引用

页码：1129 / 1132

页数：4

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