A simple apparatus for the determination of the optical constants and the thickness of absorbing thin films

被引:11
|
作者
Calì, C
Mosca, M
Targia, G
机构
[1] Univ Palermo, INFM, I-90128 Palermo, Italy
[2] Univ Palermo, Dipartimento Ingn Elettr, I-90128 Palermo, Italy
关键词
optical constants measurements; absorbing thin films; reflection and transmission coefficients; ITO films;
D O I
10.1016/S0030-4018(01)01123-3
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report on a simple and inexpensive apparatus useful for measuring the optical constants n, k and the thickness of weakly absorbing thin films. The measurement is based on an accurate determination of the reflectance and transmittance of a specimen illuminated by a laser beam. The laser beam is incident on a transparent substrate coated with the film to be evaluated, with an angle of incidence equal to the Brewster angle for the substrate, and its polarization can be switched between the p and s states. If the thickness is known to be within a presumptive range, measurements of the p and s reflectance and transmittance allow a calculation of the optical constants n, k and the thickness of the film, provided the absorption is weak. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:295 / 298
页数:4
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