Ultrahigh sensitive near-infrared photodetectors based on MoTe2/germanium heterostructure

被引:64
作者
Chen, Wenjie [1 ,2 ]
Liang, Renrong [1 ,2 ]
Zhang, Shuqin [1 ,2 ]
Liu, Yu [1 ,2 ]
Cheng, Weijun [1 ,2 ]
Sun, Chuanchuan [3 ]
Xu, Jun [1 ,2 ]
机构
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Beijing Natl Res Ctr Informat Sci & Technol BNRis, Beijing 100084, Peoples R China
[3] Beijing Inst Control Engn, Beijing 100084, Peoples R China
关键词
heterojunction; photodetector; MoTe2; Ge; near-infrared; HIGH-RESPONSIVITY; MOS2; PHOTODETECTOR; HETEROJUNCTION; LAYER; GE; PHOTODIODES; TRANSITION; JUNCTION; DRIVEN; MOTE2;
D O I
10.1007/s12274-019-2583-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The efficient near-infrared light detection of the MoTe2/germanium (Ge) heterojunction has been demonstrated. The fabricated MoTe2/Ge van der Waals heterojunction shows excellent photoresponse performances under the illumination of a 915 nm laser. The photoresponsivity and specific detectivity can reach to 12,460 A/W and 3.3 x 10(12) Jones, respectively. And the photoresponse time is 5 ms. However, the MoTe2/Ge heterojunction suffers from a large reverse current at dark due to the low barrier between MoTe2 and Ge. Therefore, to reduce the reverse current, an ultrathin GeO2 layer deposited by ozone oxidation has been introduced to the MoTe2/Ge heterojunction. The reverse current of the MoTe2/GeO2/Ge heterojunction at dark was suppressed from 0.44 mu A/mu m(2) to 0.03 nA/mu m(2), being reduced by more than four orders of magnitude. The MoTe2/Ge heterojunction with the GeO2 layer also exhibits good photoresponse performances, with a high responsivity of 15.6 A/W, short response time of 5 ms, and good specific detectivity of 4.86 x 10(11) Jones. These properties suggest that MoTe2/Ge heterostructure is one of the promising structures for the development of high performance near-infrared photodetectors.
引用
收藏
页码:127 / 132
页数:6
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