Gas-phase conversion of tetramethoxysilane to trimethoxysilane

被引：2
|
作者：
Kojima, T
Uchiyama, T
Murata, D
Kato, S
Watanabe, Y
Shibuya, H
机构：
[1] Seikei Univ, Dept Appl Chem, Tokyo 1808633, Japan
[2] JGC Corp, Res & Dev Div, Ibaraki 3111313, Japan
来源：
KAGAKU KOGAKU RONBUNSHU | 2005年 / 31卷 / 02期
关键词：
gas-phase conversion; copper catalysis; tetramethoxysilane; trimethoxysilane; silicon;
D O I：
10.1252/kakoronbunshu.31.115
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
The possibility of gas-phase conversion of tetramethoxysilane to trimethoxysilane was thermodynamically and experimentally evaluated. Tetramethoxysilane is a byproduct of a proposed process for production of poly-crystalline silicon from trimethoxysilane without using chlorine compounds. It was found that a trimethoxysilane yield of more than one percent is possible under conditions of 0.1 MPa and 1023 K with a Si-Cu catalyst.
引用
收藏
页码：115 / 117
页数：3
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