Efficient growth of high-quality graphene films on Cu foils by ambient pressure chemical vapor deposition

被引:156
作者
Gao, Libo [1 ]
Ren, Wencai [1 ]
Zhao, Jinping [1 ]
Ma, Lai-Peng [1 ]
Chen, Zongping [1 ]
Cheng, Hui-Ming [1 ]
机构
[1] Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China
关键词
Compendex;
D O I
10.1063/1.3512865
中图分类号
O59 [应用物理学];
学科分类号
摘要
We developed an ambient pressure chemical vapor deposition (CVD) for rapid growth of high-quality graphene films on Cu foils. The quality and growth rate of graphene films are dramatically increased with decreasing H-2 concentration. Without the presence of H-2, continuous graphene films are obtained with a mean sheet resistance of < 350 Omega/sq and light transmittance of 96.3% at 550 nm. Because of the ambient pressure, rapid growth rate, absence of H-2 and readily available Cu foils, this CVD process enables inexpensive and high-throughput growth of high-quality graphene films. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3512865]
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页数:3
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