Multipurpose 14.5 GHz ECR ion source:: Special features and application for surface modification

被引：8

作者：

Kökényesi, S

Iván, I

Takáes, E

Pálinkás, J

Biri, S

Valek, A

机构：

[1] Univ Debrecen, H-4026 Debrecen, Hungary

[2] ATOMKI, Inst Nucl Res, Debrecen, Hungary

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2005年 / 233卷

关键词：

ECR; ECRIS; HCI; surface modification; nanopattcrns hillocks;

D O I：

10.1016/j.nimb.2005.03.110

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Highly charged Xe+q ions (up to q = 27) were produced by it 14.5 GHz electron cyclotron resonance ion source and used for solid surface modification experiments. AFM investigations show that hillock-like defects are created by ions with q = 20 and 24 on the surface of thin Se films as well as on the natural facets of multi-component SbSI crystals. (c) 2005 Published by Elsevier B.V.

引用

页码：222 / 226

页数：5

共 10 条

[1]

[Anonymous], 2003, AMORPHOUS SEMICONDUC

[2] Potential sputtering [J].

Aumayr, F ;

Winter, H .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2004, 362 (1814) :77-102

[3] Imaging of ECR plasmas with a pinhole X-ray camera [J].

Biri, S ;

Valek, A ;

Suta, T ;

Takács, E ;

Szabó, C ;

Hudson, LT ;

Radics, B ;

Imrek, J ;

Juhász, B ;

Pálinkás, J .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (05) :1420-1422

[4] Production of multiply charged fullerene and carbon cluster beams by a 14.5 GHz ECR ion source [J].

Biri, S ;

Valek, A ;

Kenéz, L ;

Jánossy, A ;

Kitagawa, A .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (02) :881-883

[5]

BITENSKY IS, 1979, ZH TEKH FIZ, V49, P1042

[6] STUDIES OF THE INTERACTION OF SLOW VERY HIGHLY-CHARGED IONS WITH SOLID-SURFACES USING THE LLNL EBIT FACILITY [J].

BRIERE, MA ;

SCHNEIDER, D ;

MCDONALD, J ;

REAVES, M ;

RUHLICKE, C ;

WEINBERG, G ;

KNAPP, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 90 (1-4) :231-236

[7]

FELTZ A, 1983, AMORPHE UND GLASARTI

[8] Nanoscopic surface modification by slow ion bombardment [J].

Gebeshuber, IC ;

Cernusca, S ;

Aumayr, F ;

Winter, HP .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 2003, 229 (1-2) :27-34

[9] Comparison of photo- and deuteron-induced effects in amorphous chalcogenide layers [J].

Kökényesi, S ;

Csikai, J ;

Raics, P ;

Szabo, IA ;

Szegedi, S ;

Vitez, A .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2003, 326 :209-214

[10] Surface grating formation and erasing on a-Se films [J].

Palyok, V ;

Szabó, IA ;

Beke, DL ;

Kikineshi, A .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (05) :683-687

← 1 →