Indium Phosphide Membrane Nanophotonic Integrated Circuits on Silicon

被引:43
作者
Jiao, Yuqing [1 ]
van der Tol, Jos [1 ]
Pogoretskii, Vadim [1 ]
van Engelen, Jorn [1 ]
Kashi, Amir Abbas [1 ]
Reniers, Sander [1 ]
Wang, Yi [1 ]
Zhao, Xinran [1 ]
Yao, Weiming [2 ]
Liu, Tianran [1 ]
Pagliano, Francesco [1 ,3 ]
Fiore, Andrea [1 ]
Zhang, Xuebing [1 ]
Cao, Zizheng [1 ]
Kumar, Rakesh Ranjan [4 ]
Tsang, Hon Ki [4 ]
van Veldhoven, Rene [5 ]
de Vries, Tjibbe [5 ]
Geluk, Erik-Jan [5 ]
Bolk, Jeroen [1 ]
Ambrosius, Huub [1 ,5 ]
Smit, Meint [1 ]
Williams, Kevin [1 ]
机构
[1] Eindhoven Univ Technol, IPI, POB 513, NL-5600 MB Eindhoven, Netherlands
[2] PITC, POB 513, NL-5600 MB Eindhoven, Netherlands
[3] NanoPHAB, Groene Loper 19,POB 513, NL-5612 AP Eindhoven, Netherlands
[4] Chinese Univ Hong Kong, Dept Elect Engn, Shatin, Hong Kong, Peoples R China
[5] Eindhoven Univ Technol, Nanolab TU E, POB 513, NL-5600 MB Eindhoven, Netherlands
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2020年 / 217卷 / 03期
关键词
indium phosphide; membranes; nanophotonics; photonic integration; photonic integrated circuits; semiconductor laser; waveguides; FREE-CARRIER LIFETIME; LASER; THRESHOLD; 2-PHOTON; PATH;
D O I
10.1002/pssa.201900606
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Photonic integration in a micrometer-thick indium phosphide (InP) membrane on silicon (IMOS) offers intrinsic and high-performance optoelectronic functions together with high-index-contrast nanophotonic circuitries. Recently demonstrated devices have shown competitive performances, including high side-mode-suppression ratio (SMSR) lasers, ultrafast photodiodes, and significant improvement in critical dimensions. Applications of the IMOS devices and circuits in optical wireless, quantum photonics, and optical cross-connects have proven their performances and high potential.
引用
收藏
页数:12
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