FABRICATION OF SPIRAL PHASE PLATES FOR OPTICAL VORTICES

被引：0

作者：

Tudor, Rebeca ^{[1
]}

Kusko, Mihai ^{[1
]}

Kusko, Cristian ^{[1
]}

Craciunoiu, Florea ^{[1
]}

Avram, Andrei ^{[1
]}

Vasilache, Dan ^{[1
]}

机构：

[1] Natl Inst Res & Dev Microtechnol Bucharest, Voluntari, Romania

来源：

2014 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS) | 2014年

关键词：

topological charge; spiral phase plate; optical vortex; ORBITAL ANGULAR-MOMENTUM; BEAMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents a reproductible fabrication process of spiral phase plates (SPPs) based on microfabrication techniques such as photolithography and reactive ion etching (RIE). The fabricated SPPs operate in the reflection mode in order to generate optical vortices with topological charge m = 2 and m = 4. Structural and functional characterizations prove the optical quality of the fabricated SPP.

引用

页码：139 / 142

页数：4

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