Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator

被引：111
|
作者：
Yang, Liang [1 ,2 ]
El-Tamer, Ayman [2 ]
Hinze, Ulf [2 ]
Li, Jiawen [1 ]
Hu, Yanlei [1 ]
Huang, Wenhao [1 ]
Chu, Jiaru [1 ]
Chichkoy, Boris N. [2 ]
机构：
[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Peoples R China
[2] Laser Zentrum Hannover EV, D-30419 Hannover, Germany
来源：
OPTICS AND LASERS IN ENGINEERING | 2015年 / 70卷
基金：
中国国家自然科学基金; 中国博士后科学基金;
关键词：
Femtosecond laser; Two-photon polymerization; Spatial light modulator; Micro-optics; 2-PHOTON POLYMERIZATION; PHOTOPOLYMERIZATION; NANOFABRICATION; ARRAYS; FOCI;
D O I：
10.1016/j.optlaseng.2015.02.006
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Two-photon polymerization (2PP) is a powerful tool for direct laser writing of micro-optical and photonic structures due to its flexibility in 3D structuring and sub-micrometer resolution. However, it can be time consuming to fabricate arrays of micro-optical devices and complex photonic structures. In this study, we propose to use predefined patterns (PPs) for parallel 2PP processing. A PP contains a multiple focal spot pattern optimized for the fabrication of certain microstructures. PP can be created by holographic laser beam modulation with a spatial light modulator (SLM). The quantity and position of the multiple foci can be flexibly and precisely controlled by predesigned computer generated holograms (CGHs). With these specially designed PPs, parallel fabrication of arbitrary distributed microlens arrays and 3D photonic structures is demonstrated. This method significantly improves throughput and flexibility of the 2PP technique and can be used for mass production of functional devices in micro-optics and photonics. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码：26 / 32
页数：7
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