Fabrication and properties of Al2O3 and A1N coatings for fusion reactor blanket by sputtering method

被引：16

作者：

Terai, T ^{[1
]}

Kobayashi, T

Mitsuyama, T

Yoneoka, T

Tanaka, S

机构：

[1] Univ Tokyo, Inst Engn Res, Bunkyo Ku, Tokyo 113, Japan

[2] Univ Tokyo, Dept Quantum Engn & Syst Sci, Bunkyo Ku, Tokyo 113, Japan

来源：

SURFACE & COATINGS TECHNOLOGY | 1998年 / 106卷 / 01期

关键词：

AlN; Al2O3; fusion reactor; sputtering;

D O I：

10.1016/S0257-8972(98)00486-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The development of insulating ceramic coatings is one of the most important subjects in fusion reactor liquid metal blanket R&D. Al2O3 and AIN are candidate materials for ceramic coatings because of their high electrical resistivity and high thermodynamic stability. In this study, Al2O3 and AIN coatings were fabricated by the RF sputtering method, and their properties were investigated. The prepared Al2O3 coatings seemed to be amorphous, and they had high electrical resistivity with high density comparable with the theoretical density. On the other hand, the prepared AIN coatings had remarkably low electrical resistivity because they presumably had non-stoichiometry (AIN(1-x)). (C) 1998 Elsevier Science S.A.

引用

页码：18 / 22

页数：5

共 9 条

[1] CORROSION OF INSULATING LAYERS ON MANET STEEL IN FLOWING PB-17LI [J].