[1] Harbin Inst Technol Weihai, Sch Mat Sci & Engn, Weihai 264209, Peoples R China
[2] Intel Semicond Dalian Ltd, Dalian 116600, Peoples R China
[3] Lanzhou Univ Technol, Sch Sci, Lanzhou 730050, Peoples R China
[4] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
[5] Changchun Univ Sci & Technol, Sch Chem & Environm Engn, Changchun 130000, Peoples R China