Piezoelectric P(VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications

被引：13

作者：

Banquart, Aline ^{[1
,2
,3
]}

Calle, Samuel ^{[2
]}

Levassort, Franck ^{[2
]}

Fritsch, Lionel ^{[4
,5
]}

Ossant, Frederic ^{[1
]}

Siewe, Sean Toffessi ^{[1
,2
,3
]}

Chevalliot, Stephanie ^{[3
]}

Capri, Arnaud ^{[3
]}

Gregoire, Jean-Marc ^{[1
]}

机构：

[1] Univ Tours, INSERM, iBrain, UMR 1253, F-37000 Tours, France

[2] Univ Tours, CNRS, UMR 7347, GREMAN,INSA CVL, F-37100 Tours, France

[3] Carestream Dent France, F-77183 Croissy Beaubourg, France

[4] Irlynx SA, F-38240 Meylan, France

[5] LFritsch Technol Consulting, F-38383 St Etienne De Crossey, France

来源：

JOURNAL OF APPLIED PHYSICS | 2021年 / 129卷 / 19期

关键词：

FLUORIDE; DESIGN; PVDF; FABRICATION; PHASE;

D O I：

10.1063/5.0048444

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the innovative processing of poly(vinylidene fluoride-trifluoroethylene) P(VDFx-TrFE1-x) (x=83mol.%) by inkjet printing to deliver uniform and thickness-controlled layers on silicon substrates. Here, we provide detailed processing steps and optimize film deposition conditions. The thickness coupling factor for a P(VDF-TrFE) film around 11 mu m thick was 22%, demonstrating good electromechanical performance after poling. These multilayer structures were specifically for high-frequency, single-element ultrasonic transducer applications. The measurements of electro-acoustic responses were in water. The maximal frequency was centered at 33.2MHz and had a fine axial resolution at 22 mu m, corresponding to a fractional bandwidth at -6dB of 100%. In the context of technological evolutions aimed at miniaturized devices and integrated electronics, these results allow for the consideration of complex structures such as multi-element transducers for high-frequency imaging applications.

引用

页数：8

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