A High Tensile Stress Spacer by Low Temperature Microwave Anneal Induced 50% Mobility Enhancement for Nano Scale FinFETs Device

被引：0

作者：

Chen, Yi-Ju ^{[1
]}

Huang, Yao-Ming ^{[1
]}

Hou, Yun-Fang ^{[1
]}

Chen, Min-Cheng ^{[1
]}

Lee, Yao-Jen ^{[1
,2
]}

Wu, Wen-Fa ^{[1
]}

Shieh, Jia-Ming ^{[1
]}

机构：

[1] Natl Nano Device Labs, Hsinchu, Taiwan

[2] Natl Chung Hsing Univ, Dept Phys, Taichung, Taiwan

来源：

PROCEEDINGS OF THE 22ND INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2015) | 2015年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Tensile stress enhancement by rapid thermal annealing (RTA) and microwave annealing (MWA) are compared in this study. SiNx films after low temperature MWA treatment depicted higher tensile stress than the films annealed by RTA. Therefore, MWA approach is useful in contact etch-stop layer or stress memorization technique for the fabrication of small pitch nanoscaled n-channel FinFETs.

引用

页码：401 / 404

页数：4

共 4 条

[1] High Tensile Stress with Minimal Dopant Diffusion by Low Temperature Microwave Anneal
Lee, Yao-Jen
Lu, Yu-Lun
Mu, Zheng-Chang
Hsueh, Fu-Kuo
Chao, Tien-Sheng
Wu, Ching-Yi
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 14 (05) : H191 - H193
[2] Low temperature recovery of OFF-state stress induced degradation of AlGaN/GaN high electron mobility transistors
Al-Mamun, Nahid Sultan
Sheyfer, Dina
Liu, Wenjun
Haque, Aman
Wolfe, Douglas E.
Pagan, Darren C.
APPLIED PHYSICS LETTERS, 2024, 124 (01)
[3] Segregation-Induced Enhancement of Low-Temperature Tensile Ductility in a Cast High-Nitrogen Austenitic Stainless Steel Exhibiting Deformation-Induced α' Martensite Formation
Mola, Javad
Wendler, Marco
Weiss, Andreas
Reichel, Benedikt
Wolf, Gotthard
De Cooman, Bruno C.
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2015, 46A (04): : 1450 - 1454
[4] Segregation-Induced Enhancement of Low-Temperature Tensile Ductility in a Cast High-Nitrogen Austenitic Stainless Steel Exhibiting Deformation-Induced α′ Martensite Formation
Javad Mola
Marco Wendler
Andreas Weiß
Benedikt Reichel
Gotthard Wolf
Bruno C. De Cooman
Metallurgical and Materials Transactions A, 2015, 46 : 1450 - 1454

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