Screen-printed piezoelectric ceramic thick films with sintering additives introduced through a liquid-phase approach

被引：38

作者：

Yao, K ^{[1
]}

He, XJ ^{[1
]}

Xu, Y ^{[1
]}

Chen, MM ^{[1
]}

机构：

[1] Micro & Nano Syst Cluster, IMRE, Singapore 117602, Singapore

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 118卷 / 02期

关键词：

piezoelectric; screen-print; ceramics; thick films; sensors; laser scanning vibrometer; liquid phase;

D O I：

10.1016/j.sna.2004.08.022

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Lead zirconate titanate (PZT) ceramic films, 30 mum thick, were deposited onto Pt-coated silicon wafers by a screen-printing, process. A chemical liquid-phase doping method was used to introduce sintering aids with improved homogeneity in the PZT thick films. Porous thick films with good adhesion were formed on the substrates after heating at a temperature of 925degreesC. The morphology, dielectric, ferroelectric and piezoelectric properties of the thick films were characterized. Stable out-of-plane piezoelectric vibration of the thick films was observed with a laser scanning vibrometer (LSV), and the piezoelectric dilatation magnitude was determined accordingly. The effective longitudinal piezoelectric coefficient d(33) was evaluated according to numerical simulations with the elastic clamping of the substrate taken into account. High piezoelectric voltage constants were obtained due to the very low dielectric constant of the porous thick films. These films have application potential as integrated piezoelectric sensors. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：342 / 348

页数：7

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