Aerosol spray pyrolysis (ASP) was used to deposit Gd2O3 on pure Ni and Ni(5at%W). The H-2 : H2O ratio in the gas stream, consisting of forming gas + the aqueous nitrate mist, was adjusted to 0.75, which prevented the Ni(W) substrate from oxidizing. A dense, similar to 600 rim thick layer of Gd2O3 could be deposited on a textured Ni(5at%W) substrate at 900 degrees C in 20 min. The Gd2O3 was not textured and the surface was rough.