Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse

被引：32

作者：

Ishino, Masahiko ^{[1
]}

Faenov, Anatoly Ya. ^{[1
,2
]}

Tanaka, Momoko ^{[1
]}

Hasegawa, Noboru ^{[1
]}

Nishikino, Masaharu ^{[1
]}

Tamotsu, Satoshi ^{[3
]}

Pikuz, Tatiana A. ^{[1
,2
]}

Inogamov, Nail A. ^{[4
]}

Zhakhovsky, Vasily V. ^{[2
,5
]}

Skobelev, Igor Yu. ^{[2
]}

Fortov, Vladimir E. ^{[2
]}

Khohlov, Viktor A. ^{[4
]}

Shepelev, Vadim V. ^{[6
]}

Ohba, Toshiyuki ^{[1
]}

Kaihori, Takeshi ^{[1
]}

Ochi, Yoshihiro ^{[1
]}

Imazono, Takashi ^{[1
]}

Kawachi, Tetsuya ^{[1
]}

机构：

[1] Japan Atom Energy Agcy, Kansai Photon Sci Inst, Kizu, Kyoto 6190215, Japan

[2] Russian Acad Sci, Joint Inst High Temp, Moscow 125412, Russia

[3] Nara Womens Univ, Grad Sch Humanities & Sci, Nara 6308506, Japan

[4] Russian Acad Sci, LD Landau Theoret Phys Inst, Chernogolovka 142432, Russia

[5] Univ S Florida, Dept Phys, Tampa, FL 33620 USA

[6] Russian Acad Sci, Inst Comp Aided Design, Moscow 123056, Russia

来源：

JOURNAL OF APPLIED PHYSICS | 2011年 / 109卷 / 01期

基金：

俄罗斯基础研究基金会;

关键词：

13.9; NM; SPALLATIVE ABLATION; LIF CRYSTAL; DIELECTRICS; THRESHOLDS; MORPHOLOGY; RESOLUTION; PLASMA;

D O I：

10.1063/1.3525980

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We irradiated the soft x-ray laser (SXRL) pulses having a wavelength of 13.9 nm, a duration time of 7 ps, and fluences of up to 27 mJ/cm(2) to aluminum (Al) surface. After the irradiation process, the modified surface was observed with the visible microscope, the scanning electron microscope, and the atomic force microscope. The surface modifications caused by the SXRL pulses were clearly seen, and it was found that the conical structures having about 70-150 nm in diameters were formed under a single pulse shot. The conical structures were formed in the features with the average depth of about 40 nm, and this value was in accordance with the attenuation length of the SXRL beam for Al. However, those conical structures were deconstructed under the multiple pulse shots exposure. Thermomechanical modeling of SXRL laser interaction with Al surface, which explains nanostructure surface modification, was provided. (C) 2011 American Institute of Physics. [doi:10.1063/1.3525980]

引用

页数：6

共 33 条

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