Development of an Efficient and Controllable Nano-porous Copper with Good Wettability and Capillary Performance for Wicks of Vapor Chamber

被引:3
作者
Chen, Sizhen [1 ,2 ]
Cai, Han [1 ,2 ]
Li, Yahui [1 ,2 ]
Zhang, Qi [1 ,2 ]
Sun, Yunna [1 ]
Ding, Guifu [1 ]
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Shanghai 200240, Peoples R China
基金
中国国家自然科学基金;
关键词
Nano-porous copper (NPC); Electrodeposition; Dealloying; Wettability; Capillary performance; Wick; THERMAL PERFORMANCE; NANOPOROUS COPPER; COMPOSITE WICK; HEAT PIPES; FABRICATION; CU; MORPHOLOGY; FILMS; RESISTANCE; EVOLUTION;
D O I
10.1007/s13391-022-00357-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
To meet the heat dissipation requirements of microelectronic devices, it is urgent to develop an efficient method to fabricate a controllable micro/nano structure for the wick in vapor chamber, which is widely investigated for its high thermal conductivity and small size. This work proposed a controllable fabrication of nano-porous copper (NPC) with high efficiency, which includes electrodeposition and dealloying. A uniform Cu-Zn alloy with single phase was prepared as the precursor for dealloying through electrodeposition. An innovative solution system for dealloying was developed for the fabrication of the bi-continuous NPC, in which the efficiency was improved ten times compared to the conventional acid solution. In addition, the effects of dealloying parameters on the NPC morphology and the process efficiency have also been studied systematically. Based on the above method, both good wettability and capillary performance were achieved by NPC with tunable pore size, which indicates its great application prospects in wicks for high-performance vapor chamber. [GRAPHICS] .
引用
收藏
页码:465 / 474
页数:10
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