Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure

被引:37
作者
Urabe, Keiichiro [1 ]
Ito, Yosuke [1 ]
Sakai, Osamu [1 ]
Tachibana, Kunihide [1 ,2 ]
机构
[1] Kyoto Univ, Dept Elect Sci & Engn, Nishikyo Ku, Kyoto 6158510, Japan
[2] Ehime Univ, Promot Lab Plasma & Photon Sci Res, Matsuyama, Ehime 7908577, Japan
关键词
CHEMICAL-VAPOR-DEPOSITION; MICROPLASMA JETS; NONEQUILIBRIUM; FILMS;
D O I
10.1143/JJAP.49.106001
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the discharge mechanisms in a helium plasma jet with a coaxial dielectric barrier discharge (DBD) configuration, which can generate low-temperature plasma plume mainly by positive corona streamer propagation. In this study, we focused on the relationships between the coaxial DBD inside a glass tube and the positive streamer propagating in the plasma plume, using novel types of electrode configurations composed of insulated electric wires. The discharge characteristics were investigated by measuring plume length, discharge currents of the DBD, and the line-integrated density of helium metastable atoms in the plume. The experimental results indicate that the excited-species density in the plume is largely dependent on surface-charge density accumulated by the DBD. Moreover, we analyzed the spatiotemporal distribution of electrical potential around the tube exit by the finite element method, and discussed the mechanism determining plume length. (C) 2010 The Japan Society of Applied Physics
引用
收藏
页码:1060011 / 1060016
页数:6
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