Microbeam of 100 keV x ray with a sputtered-sliced Fresnel zone plate

被引：43

作者：

Kamijo, N

Suzuki, Y

Takano, H

Tamura, S

Yasumoto, M

Takeuchi, A

Awaji, M

机构：

[1] Kansai Med Univ, Osaka 5731136, Japan

[2] SPring 8, Hyogo 6795198, Japan

[3] AIST, Photon Res Inst, Kasnsai Ctr, Osaka, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2003年 / 74卷 / 12期

关键词：

D O I：

10.1063/1.1614882

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Microfocusing of 100 keV x ray with a sputtered-sliced Fresnel zone plate (ss-FZP) has been performed at the 250-m-long beamline (20XU) of SPring-8. The ss-FZP with an outermost zone width 0.16 mum which is composed of 70 layers of alternating Cu and Al layers and having thickness similar to180 mum was fabricated and characterized. The minimum focal spot size attained for the first order focal beam was 0.5 mum with a focal distance 900 mm at a photon energy 100 keV. The total flux of the microprobe was similar to2x10(6) photons s(-1) mum(-2). (C) 2003 American Institute of Physics.

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收藏

页码：5101 / 5104

页数：4

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