Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography

被引：34

作者：

Gonidec, Mathieu ^{[1
]}

Hamedi, Mahiar M. ^{[1
]}

Nemiroski, Alex ^{[1
]}

Rubio, Luis M. ^{[1
]}

Torres, Cesar ^{[1
]}

Whitesides, George M. ^{[1
,2
,3
]}

机构：

[1] Harvard Univ, Dept Chem & Chem Biol, 12 Oxford St, Cambridge, MA 02138 USA

[2] Harvard Univ, Wyss Inst Biol Inspired Engn, 60 Oxford St, Cambridge, MA 02138 USA

[3] Harvard Univ, Kavli Inst Bionano Sci & Technol, 29 Oxford St, Cambridge, MA 02138 USA

来源：

NANO LETTERS | 2016年 / 16卷 / 07期

基金：

美国国家科学基金会;

关键词：

Microfabrication; self-assembly; microlens lithography; metamaterials; 2-DIMENSIONAL ARRAYS; METAMATERIALS; PHOTOLITHOGRAPHY; SUPERLENS; OPTICS;

D O I：

10.1021/acs.nanolett.6b00952

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This paper describes a strategy that uses template directed self-assembly of micrometer-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of "template-encoded microlens projection lithography" (TEMPL) enables rapid prototyping of planar, multiscale patterns of similarly shaped structures with critical dimensions down to similar to 400 nm. Each of these structures is defined by local projection lithography with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of nonperiodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior.

引用

页码：4125 / 4132

页数：8

共 31 条

[1] Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces [J].