Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity

被引：186

作者：

Chen, Nannan ^{[1
]}

Tucker, Craig ^{[1
]}

Engel, Jonathan M. ^{[1
]}

Yang, Yingchen ^{[1
]}

Pandya, Saunvit ^{[1
]}

Liu, Chang ^{[1
]}

机构：

[1] Univ Illinois, Micro & Nanotechnol Lab, Micro & Nanotechnol Res Grp, Urbana, IL 61801 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2007年 / 16卷 / 05期

关键词：

biomechanics; microelectromechanical devices; piezoresistive devices; sensitivity; sensory aids; silicon;

D O I：

10.1109/JMEMS.2007.902436

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the development of an artificial haircell (AHC) sensor with design inspired by biological haircells. The sensor consists of a silicon cantilever beam with a high-aspect-ratio cilium attached at the distal end. Sensing is based on silicon piezoresistive strain gauge at the base of the cantilever. The cilium is made of photodefinable SU-8 epoxy and can be up to 700-mu m tall. In this paper, we focus on flow-sensing applications. We have characterized the performance of the AHC sensor both in water and in air. For underwater applications, we have characterized the sensor under two flow conditions: steady-state laminar flow (dc flow) and oscillatory flow (ac flow). The detection limit of the sensor under ac flow in water is experimentally established to be below 1 mm/s. A best case angular resolution of 2.16 degrees is also achieved for the sensor's yaw response in air.

引用

页码：999 / 1014

页数：16

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