Simulations and experiments of hardening and softening resonances in a clamped-clamped beam MEMS resonator

被引：64

作者：

Mestrom, R. M. C. ^{[1
]}

Fey, R. H. B. ^{[2
]}

Phan, K. L. ^{[3
]}

Nijmeijer, H. ^{[2
]}

机构：

[1] Eindhoven Univ Technol, Dept Elect Engn, Electromagnet & Wireless Grp, NL-5600 MB Eindhoven, Netherlands

[2] Eindhoven Univ Technol, Dept Mech Engn, Dynam & Control Grp, NL-5600 MB Eindhoven, Netherlands

[3] NXP Semicond, NXP TSMC Res Ctr, NL-5656 AE Eindhoven, Netherlands

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2010年 / 162卷 / 02期

关键词：

MEMS resonator; Multiphysics modeling; Nonlinear dynamic behavior; Experimental validation; ELECTROSTATICALLY ACTUATED MICROSTRUCTURES; INTERNAL-FRICTION; VIBRATING BEAMS; MICROBEAM; DYNAMICS; SHEAR;

D O I：

10.1016/j.sna.2010.04.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

By means of a combined analytical-numerical and experimental approach, the nonlinear dynamic behavior of a clamped-clamped beam MEMS resonator has been investigated. A good qualitative correspondence between simulations and experiments has been obtained. First-principles based multiphysics modeling is applied to derive a reduced-order model of the resonator. The model includes nonlinear geometric and electrostatic effects as well as thermoelastic damping. Both simulations and experiments show hardening and softening nonlinear dynamic behavior depending on the excitation parameters. The model captures the observed nonlinear behavior qualitatively and allows for design optimization with respect to nonlinear effects. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：225 / 234

页数：10

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