Fabrication of titania nanopoles by nanoporous alumina template

被引:0
作者
Her, Hyun-Jung
Kim, Jung-Min
Kim, Jaewan
Choi, Y. J.
Kang, C. J.
Kim, Yong-Sang
机构
来源
2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2007年
关键词
nanoporous alumina template; nanopoles titania; nanopores titania;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a formation of thin film titania (TiO2) with dense array of nanopoles and nanopores. The heights of poles and pores are 180 nm and 130 urn, respectively. In order to get titania nanopoles and nanopores, we make a nanoporous alumina (Al2O3) template through a two-step anodization process, which is essential for the uniform and densified nanopores on aluminum surface. Nano-structured titania films were spin-coated under sol-gel state. The spin-coated titania films were then uniformly patterned by nanoimprinting lithography technique with textured PMMA mold or nanoporous alumina template. These fabricated titania films are very useful for solar cells, photocatalytic and sensing applications wherein nano-structuring of surface with controlled dimensions are vital.
引用
收藏
页码:530 / 533
页数:4
相关论文
共 7 条
  • [1] Formation of titania nanotubes with high photo-catalytic activity
    Adachi, M
    Murata, Y
    Harada, M
    Yoshikawa, S
    [J]. CHEMISTRY LETTERS, 2000, (08) : 942 - 943
  • [2] Mo/Si multilayers for EUV lithography by ion beam sputter deposition
    Chassé, T
    Neumann, H
    Ocker, B
    Scherer, M
    Frank, W
    Frost, F
    Hirsch, D
    Schindler, A
    Wagner, G
    Lorenz, M
    Otto, G
    Zeuner, M
    Rauschenbach, B
    [J]. VACUUM, 2003, 71 (03) : 407 - 415
  • [3] Nanoimprint lithography
    Chou, SY
    Krauss, PR
    Renstrom, PJ
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4129 - 4133
  • [4] Infiltrating semiconducting polymers into self-assembled mesoporous titania films for photovoltaic applications
    Coakley, KM
    Liu, YX
    McGehee, MD
    Frindell, KL
    Stucky, GD
    [J]. ADVANCED FUNCTIONAL MATERIALS, 2003, 13 (04) : 301 - 306
  • [5] Nanoimprint lithography:: an alternative nanofabrication approach
    Torres, CMS
    Zankovych, S
    Seekamp, J
    Kam, AP
    Cedeño, CC
    Hoffmann, T
    Ahopelto, J
    Reuther, F
    Pfeiffer, K
    Bleidiessel, G
    Gruetzner, G
    Maximov, MV
    Heidari, B
    [J]. MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2003, 23 (1-2): : 23 - 31
  • [6] Soft lithography
    Xia, YN
    Whitesides, GM
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1998, 28 : 153 - 184
  • [7] Al2O3-coated nanoporous TiO2 electrode for solid-state dye-sensitized solar cell
    Zhang, XT
    Sutanto, I
    Taguchi, T
    Meng, QB
    Rao, TN
    Fujishima, A
    Watanabe, H
    Nakamori, T
    Uragami, M
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2003, 80 (03) : 315 - 326