共 7 条
- [2] Mo/Si multilayers for EUV lithography by ion beam sputter deposition [J]. VACUUM, 2003, 71 (03) : 407 - 415
- [3] Nanoimprint lithography [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4129 - 4133
- [5] Nanoimprint lithography:: an alternative nanofabrication approach [J]. MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2003, 23 (1-2): : 23 - 31