Design of Fiber-optic MEMS Acoustic Sensor System for Gunship Acoustic Detecting

被引：0

作者：

Jiang Bingli ^{[1
]}

Yang Kuntao ^{[1
]}

Wang Jiangan ^{[2
]}

Wu Yaming ^{[3
]}

机构：

[1] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Sch Optoelect Sci & Engn, Wuhan 430033, Peoples R China

[2] Naval Univ Engn, Inst Elect Engn, Wuhan 430033, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China

来源：

RECENT TRENDS IN MATERIALS AND MECHANICAL ENGINEERING MATERIALS, MECHATRONICS AND AUTOMATION, PTS 1-3 | 2011年 / 55-57卷

关键词：

fiber-optical sensor; acoustic sensor; EFPI; MEMS; gunship acoustic detecting;

D O I：

10.4028/www.scientific.net/AMM.55-57.719

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In this paper a new fiber-optic Microelectromechanical System (MEMS) acoustic sensor system for gunship acoustic detecting is developed. A novel MEMS acoustic sensor used in the system is designed. The sensor is based on extrinsic Fabry-Perot (FP) interferometer coupled to an external membrane for modulating the FP cavity length and a light-emitting diode (LED) as light source. The relation expression between displacement of cavity length and light intensity is deduced. Theoretical signal of the sensor is simulated.

引用

页码：719 / +

页数：2