Effect of heavy proton and neutron irradiations on epitaxial 4H-SiC Schottky diodes

被引:52
作者
Sciortino, S
Hartjes, F
Lagomarsino, S
Nava, F
Brianzi, M
Cindro, V
Lanzieri, C
Moll, M
Vanni, P
机构
[1] Univ Florence, Dipartimento Energet, I-50139 Florence, Italy
[2] INFN Florence, I-50019 Florence, Italy
[3] NIKHEF, NL-1098 SJ Amsterdam, Netherlands
[4] Univ Modena, INFN, I-41100 Modena, Italy
[5] Univ Modena, Dept Phys, I-41100 Modena, Italy
[6] Univ Ljubljana, Jozef Stefan Inst, SI-1000 Ljubljana, Slovenia
[7] Alenia Marconi Syst, I-00131 Rome, Italy
[8] CERN, EP TAI SD, CH-1211 Geneva, Switzerland
关键词
C-V characteristic; CCE characteristics; epitaxial layers; particle detectors; Schottky diodes; minimum ionizing particles;
D O I
10.1016/j.nima.2005.06.017
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this work we report electrical characterizations on heavily irradiated epitaxial H-4-SiC Schottky diodes. Even after an irradiation at a fluence of 1.4 x 10(16) p/cm(2) and 7 x 10(15) n/cm(2), we found the diodes still able to detect alpha and beta particles with a charge collection efficiency (CCE) ranging from 25 to 30% after proton irradiation and about 18% after neutron irradiation, at the highest reverse bias applied. This corresponds to a charge collection distance (CCD) of 7 mu m after the proton irradiation and 5 mu m after the neutron irradiation. As the irradiation level approaches the range similar to 10(15)/cm(2), the material behaves as intrinsic due to a very high compensation effect. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:138 / 145
页数:8
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