A global model of micro-hollow cathode discharges in the stationary regime

被引:23
作者
Lazzaroni, C. [1 ]
Chabert, P. [1 ]
机构
[1] UPMC, Ecole Polytech, CNRS, LPP, F-91128 Palaiseau, France
关键词
MICROPLASMA; MICRODISCHARGES; DIAGNOSTICS; SIMULATION; ELECTRON; PLASMA;
D O I
10.1088/0022-3727/44/44/445202
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper presents a global model of micro-hollow cathode discharges working in argon gas. Inspired by experiments and two-dimensional numerical simulations, the discharge is decomposed into two main regions, labelled the cathodic region and the positive column region. The first is composed of a cathode sheath (surrounding the cathode) and a plasma in the centre, while the positive column region is essentially filled with plasma. A cathode sheath model is developed to calculate the sheath size and the power dissipated by ions and electrons in the sheath. Charged-particle transport equations are solved in one-dimensional cylindrical coordinates, in the quasi-neutral plasma region, in order to determine the radial density profiles and the electron temperature in the microhole. A global power balance is then performed in the two distinct regions in order to determine the absolute electron density. We found that the electron density is one order of magnitude higher in the cathodic region than in the positive column, showing that the power dissipation is mainly located in the cathode sheath. The calculated electron density in the cathodic region is in reasonable agreement with experiments.
引用
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页数:12
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共 37 条
  • [1] Analysis of the self-pulsing operating mode of a microdischarge
    Aubert, Xavier
    Bauville, Gerard
    Guillon, Jean
    Lacour, Bernard
    Puech, Vincent
    Rousseau, Antoine
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2007, 16 (01) : 23 - 32
  • [2] Predicted properties of microhollow cathode discharges in xenon
    Boeuf, JP
    Pitchford, LC
    Schoenbach, KH
    [J]. APPLIED PHYSICS LETTERS, 2005, 86 (07) : 1 - 3
  • [3] Chabert P, 2011, PHYSICS OF RADIO-FREQUENCY PLASMAS, P1, DOI 10.1017/CBO9780511974342
  • [4] A model for the self-pulsing regime of microhollow cathode discharges
    Chabert, P.
    Lazzaroni, C.
    Rousseau, A.
    [J]. JOURNAL OF APPLIED PHYSICS, 2010, 108 (11)
  • [5] Modeling of Mode Transition Behavior in Argon Microhollow Cathode Discharges
    Deconinck, Thomas
    Raja, Laxminarayan L.
    [J]. PLASMA PROCESSES AND POLYMERS, 2009, 6 (05) : 335 - 346
  • [6] An atmospheric pressure self-pulsing micro thin-cathode discharge
    Du, Beilei
    Mohr, Sebastian
    Luggenhoelscher, Dirk
    Czarnetzki, Uwe
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (12)
  • [7] Experimental study and simulation of a micro-discharge with limited cathode area
    Dufour, T.
    Overzet, L. J.
    Dussart, R.
    Pitchford, L. C.
    Sadeghi, N.
    Lefaucheux, P.
    Kulsreshath, M.
    Ranson, P.
    [J]. EUROPEAN PHYSICAL JOURNAL D, 2010, 60 (03) : 565 - 574
  • [8] Atmospheric pressure microplasmas for modifying sealed microfluidic devices
    Evju, JK
    Howell, PB
    Locascio, LE
    Tarlov, MJ
    Hickman, JJ
    [J]. APPLIED PHYSICS LETTERS, 2004, 84 (10) : 1668 - 1670
  • [9] Characteristics of extreme ultraviolet emission from a discharge-produced potassium plasma for surface morphology application
    Higashiguchi, Takeshi
    Terauchi, Hiromitsu
    Yugami, Noboru
    Yatagai, Toyohiko
    Sasaki, Wataru
    D'Arcy, Rebekah
    Dunne, Padraig
    O'Sullivan, Gerry
    [J]. APPLIED PHYSICS LETTERS, 2010, 96 (13)
  • [10] ELECTRON-ION RECOMBINATION IN DENSE PLASMAS
    HINNOV, E
    HIRSCHBERG, JG
    [J]. PHYSICAL REVIEW, 1962, 125 (03): : 795 - +