共 20 条
[1]
Accurate focused ion beam sculpting of silicon using a variable pixel dwell time approach
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2006, 24 (02)
:836-844
[6]
ElTobgy M, 2005, CIRP ANN-MANUF TECHN, V54, P285
[8]
Fabrication of three-dimensional microstructures by two-dimensional slice by slice approaching via focused ion beam milling
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2004, 22 (04)
:1672-1678
[10]
MODELING OF SPUTTERING AND REDEPOSITION IN FOCUSED-ION-BEAM TRENCH MILLING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (06)
:3084-3089