High aspect ratio ordered nanoporous Ta2O5 films by anodization of Ta

被引:115
作者
Wei, W. [1 ]
Macak, J. M. [1 ]
Schmuki, P. [1 ]
机构
[1] Univ Erlangen Nurnberg, Dept Mat Sci, D-91058 Erlangen, Germany
关键词
Ta2O5; nanoporous layer; anodization; glycerol;
D O I
10.1016/j.elecom.2008.01.004
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
In this work we report the electrochemical formation of self-organized high aspect ratio Ta2O5 porous layers, grown by anodization of Ta in non-aqueous electrolytes consisting of glycerol and small additions of NH4F. Under optimized electrochemical conditions in these glycerol based electrolytes, the porous layers can be grown up to thickness of 15 mu m, with a pore diameter in the range of 10-40 nm. The dimensions and the morphology of the layers can be strongly influenced by the fluoride concentration, the applied potential and the water content in the electrolyte. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:428 / 432
页数:5
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