Effect of Annealing on Undoped and Al- doped Zinc-oxide Thin Films Prepared By Sol-Gel Method

被引:3
作者
Londhe, Priyanka U. [1 ]
Chaure, N. B. [1 ]
机构
[1] Univ Pune, Dept Phys, Pune 411007, Maharashtra, India
来源
SOLID STATE PHYSICS: PROCEEDINGS OF THE 55TH DAE SOLID STATE PHYSICS SYMPOSIUM 2010, PTS A AND B | 2011年 / 1349卷
关键词
Sol-gel; Zinc oxide; Thin Films; Photoluminescence; Atomic Force Microscopy; ZNO; GROWTH;
D O I
10.1063/1.3606059
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The nanocrystalline undoped and Al-doped zinc oxide (ZnO:Al) thin films were deposited on quartz substrate by sol-gel method. The effect of Al-doping along with the heat treatment on undoped & Al-doped ZnO thin films was extensively studied. The ZnO: Al thin films were preferentially c-axis oriented, the effect became more prominent after the heat treatment. Optical properties were studied by using UV-Vis-NIR spectrometer and Photoluminescence (PL) spectrophotometer. Atomic force micrograph revealed compact, void free & uniform deposition of both ZnO & ZnO:Al films.
引用
收藏
页码:717 / 718
页数:2
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