Cathodic arc deposition of (Al,Cr)2O3: Macroparticles and cathode surface modifications

被引：76
作者：
Pohler, M. [1 ]
Franz, R. [1 ]
Ramm, J. [2 ]
Polcik, P. [3 ]
Mitterer, C. [1 ]
机构：
[1] Univ Leoben, Christian Doppler Lab Adv Hard Coatings, Dept Phys Met & Mat Testing, A-8700 Leoben, Austria
[2] OC Oerlikon Balzers AG, LI-9469 Balzers, Liechtenstein
[3] Plansee Composite Mat GmbH, D-86983 Lechbruck, Germany
来源：
SURFACE & COATINGS TECHNOLOGY | 2011年 / 206卷 / 06期
关键词：
Arc evaporation; Compound cathode; Macroparticle; (Al; Cr)(2)O-3; Solid solution; THIN-FILMS; THERMAL-STABILITY; CRYSTAL-STRUCTURE; SOLID-SOLUTIONS; COATINGS; AL; EVAPORATION; TIN; MICROSTRUCTURE; PERFORMANCE;
D O I：
10.1016/j.surfcoat.2011.09.028
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The present work investigates the microstructure and chemical composition of macroparticles incorporated in arc evaporated (Al,Cr)(2)O-3 coatings. According to scanning and transmission electron microscopy analysis, two different types of macroparticles with a distinct difference in their shape and a noticeable variation in their chemical composition, i.e. the Al/Cr ratio, can be distinguished. In addition, the transformations on the surface of the corresponding Al-Cr compound cathodes during the evaporation process in O-2 atmosphere are studied by scanning electron microscopy and X-ray diffraction. Beside the virgin cathode material, a reaction layer consisting of various intermetallic AlxCry phases with a fine-grained morphology and pillarshaped Al2O3 islands was found. Correlations between the origin of the macroparticles and the observed modifications at the surface of the Al-Cr cathode are discussed. (C) 2011 Elsevier ay. All rights reserved.
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收藏
页码：1454 / 1460
页数：7
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