High-Resolution Compact On-Chip Spectrometer Based on an Echelle Grating With Densely Packed Waveguide Array

被引：24

作者：

Ma, Keqi ^{[1
]}

Chen, Kaixuan ^{[1
]}

Zhu, Ning ^{[2
]}

Liu, Liu ^{[3
]}

He, Sailing ^{[1
,3
]}

机构：

[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, Natl Engn Res Ctr Opt Instruments, Hangzhou 310058, Zhejiang, Peoples R China

[2] South China Normal Univ, Inst Optoelect Mat & Technol, Guangzhou 510006, Guangdong, Peoples R China

[3] South China Normal Univ, South China Acad Adv Optoelect, ZJU SCNU Joint Res Ctr Photon, Ctr Opt & Electromagnet Res, Guangzhou 510006, Guangdong, Peoples R China

来源：

IEEE PHOTONICS JOURNAL | 2019年 / 11卷 / 01期

基金：

中国国家自然科学基金;

关键词：

Echelle grating; on-chip spectrometer; densely packed waveguide array; SPECTROSCOPY; MODE;

D O I：

10.1109/JPHOT.2018.2888592

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We design a 121-channel on-chip spectrometer based on an echelle grating with densely packed waveguide array on 220-nm silicon-on-insulator platform. It offers a high spectral resolution of 0.5 nm in a 3 * 3 mm(2) footprint, covering a spectral range of 60 nm near the central wavelength of 1550 nm. We fabricate the spectrometer with 20 channels for verification of the design, which is limited by our equipment. The measured crosstalk for the fabricated device is -4.3 dB and can be improved by better fabrication techniques. This spectrometer can be used for lab-on-a-chip spectroscopy applications, such as drug analysis in biotechnological and pharmaceutical research.

引用

页数：7

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