Fabrication of large area resin microlens arrays using gas-assisted ultraviolet embossing

被引：44

作者：

Huang, Po-Hsun ^{[1
]}

Huang, Tzu-Chien ^{[1
]}

Sun, Yi-Ting ^{[2
]}

Yang, Sen-Yeu ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 106, Taiwan

[2] Ind Technol Res Inst, Mech & Syst Res Labs, Hsinchu 310, Taiwan

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 05期

关键词：

D O I：

10.1364/OE.16.003041

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Large-area microlens arrays are becoming important components in many applications such as LCD-TV diffusers. This paper reports a uniform pressure, low temperature process for their fabrication. The process integrates gas-assisted embossing and UV-curing embossing. During the process, the 230mm x 203mm PMMA substrate is pressed against the stainless-steel stamper coated with UV-curable resin. Under the gas pressuring and UV irradiating, a large array of microlens can be formed. By using this process, high embossing temperature and high embossing pressure can be avoided. Little residual stress is observed in the embossed PMMA substrate. The uniformity of large-area fabrication and optical properties of fabricated resin microlens array have been verified. This study has successfully shown the potential of this gas-assisted UV embossing process for the replication of large-area microstructures. (C) 2008 Optical Society of America.

引用

页码：3041 / 3048

页数：8

共 15 条

[1] Fabrication and characterization of microlens arrays using a cantilever-based spotter [J].

Bardinal, V. ;

Daran, E. ;

Leichle, T. ;

Vergnenegre, C. ;

Levallois, C. ;

Camps, T. ;

Conedera, V. ;

Doucet, J. B. ;

Carcenac, F. ;

Ottevaere, H. ;

Thienpont, H. .

OPTICS EXPRESS, 2007, 15 (11) :6900-6907

[2] Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer [J].

Chang, Chih-Yuan ;

Yang, Sen-Yeu ;

Huang, Long-Sun ;

Hsieh, Kuo-Huang .

OPTICS EXPRESS, 2006, 14 (13) :6253-6258

[3] Direct imprinting using soft mold and gas pressure for large area and curved surfaces [J].

Chang, JH ;

Cheng, FS ;

Chao, CC ;

Weng, YC ;

Yang, SY ;

Wang, LA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005, 23 (06) :1687-1690

[4] Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method [J].

Chang, SI ;

Yoon, JB .

OPTICS EXPRESS, 2004, 12 (25) :6366-6371

[5] Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography [J].

Chang, Wei-Lun ;

Wei, Pei-Kuen .

OPTICS EXPRESS, 2007, 15 (11) :6774-6783

[6] THE MANUFACTURE OF MICROLENSES BY MELTING PHOTORESIST [J].

DALY, D ;

STEVENS, RF ;

HUTLEY, MC ;

DAVIES, N .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1990, 1 (08) :759-766

[7] Micro lens fabrication by means of femtosecond two photon photopolymerization [J].

Guo, R ;

Xiao, SZ ;

Zhai, XM ;

Li, JW ;

Xia, AD ;

Huang, WH .

OPTICS EXPRESS, 2006, 14 (02) :810-816

[8] Simple reflow technique for fabrication of a microlens array in solgel glass [J].

He, M ;

Yuan, XC ;

Ngo, NQ ;

Bu, J ;

Kudryashov, V .

OPTICS LETTERS, 2003, 28 (09) :731-733

[9] Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist [J].

Jiang, Liang-Ting ;

Huang, Tzu-Chien ;

Chiu, Chien-Ren ;

Chang, Chih-Yuan ;

Yang, Sen-Yeu .

OPTICS EXPRESS, 2007, 15 (19) :12088-12094

[10] Replication of microlens arrays by injection molding [J].

Lee, BK ;

Kim, DS ;

Kwon, TH .

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2004, 10 (6-7) :531-535

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